DEVELOPMENT AND RESEARCH TO THE DEVICE OF MEASURING AND CONTROL OF MICROCLIMATE PARAMETERS IN THE PRODUCTION OF INTEGRATED MICROCIRCUITS
Actuality.
One of basic
achievements of microelectronics is creation of integral
microcircuits. But, modern technologies in such industry, as a
production of
integral microcircuits, are not effective without maintenance of the
whole year
round certain combinations of such parameters of microclimate as a
temperature
and humidity of air, his mobility, and also cleanness. To each of these
parameters to pursue their claims [1].
Fluctuations
in temperature causes changes in the size of ultrathin films and a
humid
environment is undesirable during virtually all manufacturing
operations.
Absorbing on many surfaces, moisture and substances dissolved in it
lead to the
formation of unwanted oxides. During heat treatment on these surfaces
can form
bumps (erosion), leading to a deterioration of the parameters of IC.
Therefore
measuring and control of parameters of microclimate at the production
of
integral microcircuits now actual as never, and this actuality in the
future,
presumably, it will be only raise, as there will be the considerable
diminishing of sizes of elements of IMC and
components, that in same queue will result in toughening of
requirements to the
parameters of microclimate.
Problem
definition and purpose of the work. The purpose work is to
develop and explore the measurement and control
of microclimate parameters in the production of integrated circuits. To achieve the
goal defined by the following objectives:
- rationale for the
selection of sensors;
- Setting requirements
for appliances;
- The rationale and
structure of the device;
- investigation of
metrological characteristics.
The
scientific novelty. Completed information
retrieval devices of similar purpose, and found that they have several
drawbacks and does not meet modern requirements. [2,3] The main
drawbacks of
devices for the object of production of integrated circuits are:
inability to
control temperature and humidity at the same time, is not precise
enough
measurements of temperature and humidity. Development of such a device
allows
you to control temperature and humidity simultaneously, with the
desired
accuracy. The proposed method is based on the contact method of
measuring
temperature and humidity. To achieve the required accuracy is planned
to
develop a new structural scheme and the use of high-precision sensors.
Expected
practical results. The result of writing
the master's work is to study the metrological characteristics of
measuring
channels of temperature and humidity, as well as the mathematical
description
of the process of measuring temperature and humidity.
Basic
part. In the production of
integrated circuits using photo printing in a
clean room, fluctuations in temperature and humidity cause changes in
the size
of ultrathin films that are applied to the integrated circuit, which is
unacceptable, so according to standards, the instrument must meet the
following
requirements: The range of measured and controlled temperatures from 0
º C to
45 º C; error in measuring channel temperature in the range of
20 º C to 24 º C
should be not more than 0,1 º C range are measured and
controlled humidity from
0% to 100% accuracy of the measuring channel humidity should not exceed
2% in
the range 20 - 60%. [4]
Methods
of temperature measurement are divided into contact and contactless.
Contact
methods are based on the introduction of the measured environment of
the probe
containing the corresponding thermometric element. In this case, the
temperature of the environment take the temperature of the probe.
Non-contact
methods based on measurement of the thermometric properties of the
medium
itself.
Wide
application was found by the contact measuring devices of
temperature[5,7]:
-
thermometers, glass liquid;
-
manometric thermometers;
- bimetal
thermometers;
- copper
and platinum resistance thermometers;
-
semiconductor resistance thermometers;
- thermocouples;
- both
digital and analog temperature sensors;
- temperature
sensor based on quartz plates;
- capacitive thermometers.
Currently, the following have been used noncontact temperature meters [6,7]:
- optical
pyrometers;
-
photoelectric pyrometers;
- color
pyrometers;
- radiation
pyrometers;
-
spectral-ratio pyrometers;
-
pyrometers full relations;
- thermal
imaging cameras.
Use of
non-contact measurement method for a given object is impractical
because the
range of measured temperatures pyrometer does not match the range of
temperature-controlled
facility.
There is
currently no universal method for measuring gas humidity. Known and
have been
used numerous (several dozen) methods based on different principles.
From the analysis of
methods to measure temperature and humidity found
that this object is expedient to use the following types of sensors:
platinum
resistance thermometers (TCП 1000П), capacitive humidity
sensors based on
polymer dielectric (Honeywell - HIH-3602-C). [6,7, 8,9]
To
create the right climate in a
clean room for manufacturing integrated circuits to automatically
maintain the
temperature and relative humidity. Therefore, to achieve this goal it
is
necessary to supply additional specific requirements for the device:
- the
presence of the keyboard, display device, power the unit from the
network;
- on /
off supply fan of the instrument menu and the external buttons, and the
pump
device from the menu;
- technological and
alarm.
- control
of actuators: valve on the coolant, the cooling agent, the humidifier,
outside
air damper.
-
automatic or manual switching "Winter-Summer. "
Functional
diagram of the developed device is
shown in Figure 1
Figure 1 - Functional diagram of the device (7 frames, the delay between frames - 2s)
Important
note.
Literature
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9. Датчики влажности компании Honeywell. [Электронный ресурс]. – Режим доступа: http://www.gaw.ru/html.cgi/txt/publ/sensor/water_sensor.htm Дата обращения: 20.03.2011.
10. Devices for measurement and control of temperature, humidity, pressure, strain, force, flow, level, pH and conductivity. [Электронный ресурс]. – Режим доступа: http://www.omega.com/ Дата обращения: 20.04.2011.